TEM studies of plasma deposited tungsten and tungsten nitride barriers for thermally stable metallization.

Title
TEM studies of plasma deposited tungsten and tungsten nitride barriers for thermally stable metallization.
Authors
김용태이창우민석기이주천이정용박영욱
Issue Date
1994-01
Publisher
Material res. soc. symp. proc.
Citation
v. 318, 335-340
URI
http://pubs.kist.re.kr/handle/201004/21081
Appears in Collections:
KIST Publication > Conference Paper
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