Thermally-induced atomic mixing at the interface of Cu and polyimide

Title
Thermally-induced atomic mixing at the interface of Cu and polyimide
Authors
고석근최원국송석균Kook D. Pae정형진
Keywords
copper; polyimide; interface
Issue Date
1994-01
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 3, NO 3, 316-321
URI
http://pubs.kist.re.kr/handle/201004/21094
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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