Performance of plasma deposited tungsten and tungsten nitride schottky contacts to GaAs.

Title
Performance of plasma deposited tungsten and tungsten nitride schottky contacts to GaAs.
Authors
김용태이창우민석기
Issue Date
1994-01
Publisher
Control of semiconductor interfaces
Citation
, 295-300
URI
http://pubs.kist.re.kr/handle/201004/21167
Appears in Collections:
KIST Publication > Article
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