Electrical properties of Rf magnetron sputtered (BaSr)TiO3 thin films on indium tin oxide-coated glass substrate.

Title
Electrical properties of Rf magnetron sputtered (BaSr)TiO3 thin films on indium tin oxide-coated glass substrate.
Authors
김태송김종희오명환
Keywords
BST thin film; sputtering process; ITO substrate
Issue Date
1994-01
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 12, NO 2, 529-532
URI
http://pubs.kist.re.kr/handle/201004/21168
ISSN
07342101
Appears in Collections:
KIST Publication > Article
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