Diamond film synthesized by DC PACVD

Title
Diamond film synthesized by DC PACVD
Authors
이재갑이욱성백영준은광용
Keywords
diamond deposition; DC PACVD
Issue Date
1994-01
Publisher
Proceedings of the 2nd Asia-Pacific conference on plasma science & technology, September 25-27, 1994
Citation
, 493-496
URI
http://pubs.kist.re.kr/handle/201004/21206
Appears in Collections:
KIST Publication > Conference Paper
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