Synthesis of diamond film using DC PACVD

Title
Synthesis of diamond film using DC PACVD
Authors
이재갑이욱성백영준은광용
Keywords
diamond; DC PACVD; quality; growth rate
Issue Date
1994-01
Publisher
대한금속학회지
Citation
VOL 32, NO 6, 742-750
URI
http://pubs.kist.re.kr/handle/201004/21209
Appears in Collections:
KIST Publication > Article
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