Low pressure chemical vapor deposition of silicon carbide

Title
Low pressure chemical vapor deposition of silicon carbide
Authors
송진수김영욱김동주최두진이준근
Keywords
silicon carbide; chemical vapor deposition; nicalon fiber; composites
Issue Date
1994-01
Publisher
요업학회지; Journal of the Korean Ceramic Society
Citation
VOL 31, NO 3, 257-264
URI
http://pubs.kist.re.kr/handle/201004/21245
ISSN
12251372
Appears in Collections:
KIST Publication > Article
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