Characteristics of ZnO thin film deposited by RF magnetron sputtering system

Title
Characteristics of ZnO thin film deposited by RF magnetron sputtering system
Keywords
ZnO; RF magnetron sputter; C-V measurement; hall measurement
Issue Date
1993-10
Publisher
한국요업학회 1993년도 추계총회, 특별강연, 연구발표회 초록집
Citation
, 222-222
URI
http://pubs.kist.re.kr/handle/201004/21348
Appears in Collections:
KIST Publication > Conference Paper
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