Sizing accuracy, counting efficiency, lower detection limit and repeatability of a wafer surface scanner for ideal and real-world particles.

Title
Sizing accuracy, counting efficiency, lower detection limit and repeatability of a wafer surface scanner for ideal and real-world particles.
Authors
배귀남Benjamin Y. H. Liu채승기
Keywords
wafer surface scanner; sizing accuracy; counting efficiency; lower detecion limit; repeatability
Issue Date
1993-01
Publisher
Journal of the electrochemical society
Citation
v. 140, no. 5, 1403-1409
URI
http://pubs.kist.re.kr/handle/201004/21360
Appears in Collections:
KIST Publication > Article
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