The study on thin film fabrication using UHV-LCVD system (I)

Title
The study on thin film fabrication using UHV-LCVD system (I)
Authors
최원국윤덕주공병인김창현황정남정광호
Issue Date
1993-01
Publisher
Journal of the Korean vacuum society
Citation
VOL 2, NO 2, 255-260
URI
http://pubs.kist.re.kr/handle/201004/21380
Appears in Collections:
KIST Publication > Article
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