Performance of the plasma deposited tungsten nitride diffusion barrier for Al and Au metallization.

Title
Performance of the plasma deposited tungsten nitride diffusion barrier for Al and Au metallization.
Authors
김용태이창우민석기
Issue Date
1993-01
Publisher
Jpn. j. of appl. phys.
Citation
v. 32, 6126-6131
URI
http://pubs.kist.re.kr/handle/201004/21386
Appears in Collections:
KIST Publication > Article
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