Dependence of residual stress of diamond-like carbon films on precursor gases and process parameters of RF PACVD.

Title
Dependence of residual stress of diamond-like carbon films on precursor gases and process parameters of RF PACVD.
Authors
이광렬백영준은광용
Keywords
DLC; stress; RF-PACVD
Issue Date
1993-01
Publisher
MRS proceedings
Citation
v. 308, 101-106
URI
http://pubs.kist.re.kr/handle/201004/21433
Appears in Collections:
KIST Publication > Conference Paper
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