Patterning of Y-Ba-Cu-O thin films by reactive ion etching (RIE).

Title
Patterning of Y-Ba-Cu-O thin films by reactive ion etching (RIE).
Authors
한택상최상삼김영환박종혁
Keywords
Y-Ba-Cu-O 고온초전도 박막; 활성이온식각법; 임계온도; 임계전류
Issue Date
1993-01
Publisher
한국재료학회지; Korean journal of materials research.
Citation
VOL 제 3 권, 151-157
URI
http://pubs.kist.re.kr/handle/201004/21486
Appears in Collections:
KIST Publication > Article
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