Chemical amplification resists for microlithography.

Title
Chemical amplification resists for microlithography.
Authors
안광덕정찬문
Issue Date
1993-01
Publisher
화학세계
Citation
v. 33, no. 11, 835-841
URI
http://pubs.kist.re.kr/handle/201004/21495
Appears in Collections:
KIST Publication > ETC
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