실리콘을 이용한 압력센서

Title
실리콘을 이용한 압력센서
Authors
주병권오명환
Keywords
MEMS; micromachining; microsensor; pressure sensor
Issue Date
1992-09
Publisher
전자부품지
Citation
, 160-160
URI
http://pubs.kist.re.kr/handle/201004/21529
Appears in Collections:
KIST Publication > ETC
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