마이크로 박막 센서의 기술동향

Title
마이크로 박막 센서의 기술동향
Authors
오명환주병권
Keywords
MEMS; micromachining; microsensor
Issue Date
1992-02
Publisher
전기학회지 .
Citation
VOL 41, NO 2, 6-11
URI
http://pubs.kist.re.kr/handle/201004/21534
Appears in Collections:
KIST Publication > ETC
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