Fabrication of ceramic thin films by PVD process

Title
Fabrication of ceramic thin films by PVD process
Authors
김태송오명환김종희
Keywords
ceramics; PVD process; thin films
Issue Date
1992-01
Publisher
Ceramics
Citation
VOL 7, NO 3, 241-247
URI
http://pubs.kist.re.kr/handle/201004/21602
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE