Characteristics of Pd-MIS devices on hydrogen gas sensing.

Title
Characteristics of Pd-MIS devices on hydrogen gas sensing.
Authors
조원일이철환신치범윤경석주재백
Keywords
metal/insulator/semiconductor; p-type silicon; silicon oxide; hydrogen; response time; regeneration time; voltage shift; palladium; surface coverage
Issue Date
1992-01
Publisher
수소에너지 =
Citation
v. 3, no. 2, 17-24
URI
http://pubs.kist.re.kr/handle/201004/21605
Appears in Collections:
KIST Publication > Article
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