Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapor deposition-grown SiN//xInP structure.

Title
Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapor deposition-grown SiN//xInP structure.
Authors
강광남이정일한일기Y. J. LeeS. Y. Kim
Keywords
InP MIS structures
Issue Date
1992-01
Publisher
Journal of materials science letters
Citation
v. 11, 1689-?
URI
http://pubs.kist.re.kr/handle/201004/21614
Appears in Collections:
KIST Publication > Article
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