Metalorganic chemical vapor deposition of BaTiO//3 thin films on Si.

Title
Metalorganic chemical vapor deposition of BaTiO//3 thin films on Si.
Authors
염상섭윤영수최상삼D. H. Lee
Keywords
thin films; BaTiO//3; MOCVD
Issue Date
1992-01
Publisher
응용물리; Korean appl. phys.
Citation
v. 5, 193-197
URI
http://pubs.kist.re.kr/handle/201004/21706
Appears in Collections:
KIST Publication > Article
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