RTA 에 의한 Si 내의 thermal donors 와 깊은 준위의 거동 .

Title
RTA 에 의한 Si 내의 thermal donors 와 깊은 준위의 거동 .
Authors
김은규조훈영김춘근민석기김현수심기대박만장
Keywords
RTA; Si; thermal donor; deep level
Issue Date
1991-04
Publisher
새물리
Citation
v. 31, no. 2, 172-176
URI
http://pubs.kist.re.kr/handle/201004/21753
Appears in Collections:
KIST Publication > Article
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