Hydrogen sensing properties of Pd-MIS sensors.

Title
Hydrogen sensing properties of Pd-MIS sensors.
Authors
조원일주재백이철환윤경석
Keywords
metal/insulator/semiconductor; p-type silicon; silicon oxide; hydrogen; response time; regeneration time; voltage shift; palladium; surface coverage
Issue Date
1991-05
Publisher
Proceedings of the Korea-Japan joint symposium on chemical sensors
Citation
, 128-133
URI
http://pubs.kist.re.kr/handle/201004/21756
Appears in Collections:
KIST Publication > Conference Paper
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