GaAs single crystal growth by the VGF technique.

Title
GaAs single crystal growth by the VGF technique.
Authors
박용주박승철한철원민석기심광보
Keywords
VGF 결정성장장치; DMF 전기로; GaAs; 원형 wafer
Issue Date
1991-05
Publisher
Korean applied physics
Citation
v. 4, no. 2, 194-199
URI
http://pubs.kist.re.kr/handle/201004/21759
Appears in Collections:
KIST Publication > Article
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