산업전자에 응용되는 실리콘 IC 센서

Title
산업전자에 응용되는 실리콘 IC 센서
Authors
주병권오명환
Keywords
MEMS; micromachining; microsensor
Issue Date
1990-11
Publisher
경영과 자동화지
Citation
, 22
URI
http://pubs.kist.re.kr/handle/201004/21768
Appears in Collections:
KIST Publication > ETC
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