New insights on the effect of hydrogen to tungsten hexafluoride ratio on PECVD-W thin films.

Title
New insights on the effect of hydrogen to tungsten hexafluoride ratio on PECVD-W thin films.
Authors
김용태민석기홍종성
Issue Date
1991-01
Publisher
Appl. phys. lett.
Citation
v. 59, 3136-3138
URI
http://pubs.kist.re.kr/handle/201004/21802
Appears in Collections:
KIST Publication > Article
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