Plasma polymerization of hexamethyldisiloxane: effect of substrate temperature.

Title
Plasma polymerization of hexamethyldisiloxane: effect of substrate temperature.
Authors
김낙중박수영이기풍송석규
Keywords
plasma polymerization; plasma deposition; glow discharge; organosilicon
Issue Date
1991-01
Publisher
폴리머; Polymer
Citation
v. 15, no. 1, 88-?
URI
http://pubs.kist.re.kr/handle/201004/21810
Appears in Collections:
KIST Publication > Article
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