Deep levels in Si-implanted and rapid thermal annealed semi-insulating GaAs.

Title
Deep levels in Si-implanted and rapid thermal annealed semi-insulating GaAs.
Authors
김은규조훈영민석기H. S. LeeT. W. KangC. Y. Hong
Keywords
deep level; Si-implant; semi-insulating GaAs
Issue Date
1991-01
Publisher
Journal of electron. mater.
Citation
v. 20, no. 2, 203-206
URI
http://pubs.kist.re.kr/handle/201004/21823
Appears in Collections:
KIST Publication > Article
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