A new method to suppress encroachment by plasma deposited tungsten thin films.

Title
A new method to suppress encroachment by plasma deposited tungsten thin films.
Authors
김용태민석기김충기
Issue Date
1991-01
Publisher
Appl. phys. lett.
Citation
v. 59, 916-918
URI
http://pubs.kist.re.kr/handle/201004/21847
Appears in Collections:
KIST Publication > Article
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