A study on the instability in PECVD-SiNx/InP structure utilizing capacatance and conductnace techniques.

Title
A study on the instability in PECVD-SiNx/InP structure utilizing capacatance and conductnace techniques.
Authors
강광남이정일한일기이명복
Keywords
PECVD
Issue Date
1991-01
Publisher
한국물리학회 학술발표회 , 전북대
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/21849
Appears in Collections:
KIST Publication > Conference Paper
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