생체계측을 위한 피하주입형 Si 센서의 기술동향

Title
생체계측을 위한 피하주입형 Si 센서의 기술동향
Authors
주병권이명복이정일김형곤강광남오명환
Keywords
MEMS; micromachining; microsensor
Issue Date
1990-06
Publisher
전자공학회지
Citation
VOL 17, NO 3, 1-9
URI
http://pubs.kist.re.kr/handle/201004/21898
ISSN
1016-9288
Appears in Collections:
KIST Publication > ETC
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