갈륨비소위에 플라즈마 화학 증착한 텅스텐박막의 특성연구 .

Title
갈륨비소위에 플라즈마 화학 증착한 텅스텐박막의 특성연구 .
Authors
김용태민석기홍종성박승철박용주한철원이명복강태원홍치유
Issue Date
1991-01
Publisher
새물리
Citation
v. 31, 574-579
URI
http://pubs.kist.re.kr/handle/201004/21907
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE