Fabrication and characterization of miniature Si pressure sensor.

Title
Fabrication and characterization of miniature Si pressure sensor.
Authors
강광남이정일이명복주병권김형곤오명환
Keywords
pressure sensor
Issue Date
1990-11
Publisher
전자공학회논문지
Citation
v. 27, no. 11, 62-68
URI
http://pubs.kist.re.kr/handle/201004/21950
Appears in Collections:
KIST Publication > Article
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