Fabrication and characterization of piezoresistive-type Si pressure microsensor

Title
Fabrication and characterization of piezoresistive-type Si pressure microsensor
Authors
주병권오명환
Keywords
screen printing method; piezoelectric thick films; remnant polarization
Issue Date
1990-01
Publisher
물리학회 연구논문발표회, 강릉대
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/21978
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE