A Study on the SiO₂ Sensing Layer Used in ISFET

Title
A Study on the SiO₂ Sensing Layer Used in ISFET
Authors
최두진임공진정형진김창은
Issue Date
1990-01
Publisher
한국요업학회지
Citation
v. 27, no. 1, 79-85
URI
http://pubs.kist.re.kr/handle/201004/21987
Appears in Collections:
KIST Publication > Article
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