Characteristics of an ionized cluster beam deposition system

Title
Characteristics of an ionized cluster beam deposition system
Authors
최원국김기원황정남Hong Su ChoeSeong Jin ChoSeong Soo KimKwang Ho Jeong
Issue Date
1990-01
Publisher
Journal of the Korean physical society
Citation
VOL 23, NO 4, 313-319
URI
http://pubs.kist.re.kr/handle/201004/22009
Appears in Collections:
KIST Publication > Article
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