CVD 법에 의한 Diamond film 합성

Title
CVD 법에 의한 Diamond film 합성
Authors
은광용백영준이욱성
Keywords
CVD 다이아몬드 막
Issue Date
1990-01
Publisher
요업재료의 과학과 기술
Citation
VOL 5, NO 2, 133-144
URI
http://pubs.kist.re.kr/handle/201004/22017
Appears in Collections:
KIST Publication > ETC
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