플라즈마 화학증착 텅스텐박막의 증착온도에 따른 비저항 및 결정구조의 변화 .

Title
플라즈마 화학증착 텅스텐박막의 증착온도에 따른 비저항 및 결정구조의 변화 .
Authors
김용태홍종성홍치유민석기
Issue Date
1990-01
Publisher
새물리
Citation
v. 30, 496-500
URI
http://pubs.kist.re.kr/handle/201004/22039
Appears in Collections:
KIST Publication > Article
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