이온주입된 실리콘의 excimer laser annealing 효과 .

Title
이온주입된 실리콘의 excimer laser annealing 효과 .
Authors
김성일김은규김용태김춘근김무성민석기
Keywords
laser annealing; silicon
Issue Date
1989-01
Publisher
응용물리
Citation
v. 2, no. 2, 129-135
URI
http://pubs.kist.re.kr/handle/201004/22187
Appears in Collections:
KIST Publication > Article
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