TiC and TiN coatings formed on Si3N4-TiC composite ceramics by chemical vapour deposition

Title
TiC and TiN coatings formed on Si3N4-TiC composite ceramics by chemical vapour deposition
Authors
D. W. Kim이준근천성순Y. J. Park
Keywords
TiC; TiN; coatings; Si//3N//4-TiC composite; chemical vapour deposition
Issue Date
1988-01
Publisher
Thin solid films
Citation
VOL 165, 149-161
URI
http://pubs.kist.re.kr/handle/201004/22230
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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