텅스텐 할로겐 램프에 의한 절연층상의 실리콘박막급속열처리 .

Title
텅스텐 할로겐 램프에 의한 절연층상의 실리콘박막급속열처리 .
Authors
김용태민석기김춘근
Issue Date
1988-01
Publisher
전자공학회논문지
Citation
v. 25, 952-957
URI
http://pubs.kist.re.kr/handle/201004/22238
Appears in Collections:
KIST Publication > Article
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