A stydy on the necleation, growth and shrinkage of oxidation induced stacking faults(OSF)

Title
A stydy on the necleation, growth and shrinkage of oxidation induced stacking faults(OSF); -part II : Role of SiO//2 layer on the shrinkage of oxidation induced stacking faults(OSF) in P-type CZ silico

Title
-part II : Role of SiO//2 layer on the shrinkage of oxidation induced stacking faults(OSF) in P-type CZ silico
Authors
김용태민석기
Issue Date
1988-01
Publisher
J. Kor. inst. telem. elec.
Citation
v. 25, 767-772
URI
http://pubs.kist.re.kr/handle/201004/22240
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KIST Publication > Article
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