Boron diffusion of low concentration through Poly·Si-SiO2

Title
Boron diffusion of low concentration through Poly·Si-SiO2
Authors
김정회주병권김철주
Keywords
박막 확산원; 저농도 불순물 확산
Issue Date
1987-03
Publisher
전자공학회 논문지 .
Citation
VOL 24, NO 2, 66-71
URI
http://pubs.kist.re.kr/handle/201004/22256
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE