Elimination of hole traps on Si wafer using reoxidation method

Title
Elimination of hole traps on Si wafer using reoxidation method
Authors
홍순관주병권김철주
Issue Date
1987-01
Publisher
전자공학회 하계종합학술대회, 포항공대
Citation
, 433-435
URI
http://pubs.kist.re.kr/handle/201004/22283
Appears in Collections:
KIST Publication > Conference Paper
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