Influence of sputtering condition on the thin film characteristics in Co-base alloys

Title
Influence of sputtering condition on the thin film characteristics in Co-base alloys
Authors
김희중한석희이택동강일구
Keywords
sputtering; Co alloy; thin film; 스퍼터링; 코발트계합금; 용질농도; solute concentration; 스퍼터율; sputter yield; 증착속도
Issue Date
1986-12
Publisher
대한금속학회지
Citation
VOL 24, NO 12, 1316-1322
URI
http://pubs.kist.re.kr/handle/201004/22334
Appears in Collections:
KIST Publication > Article
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