Crystal growth of Si and BP on Si substrates using B2H6-PH3-H2 system

Title
Crystal growth of Si and BP on Si substrates using B2H6-PH3-H2 system
Authors
주병권J. H. KiC. J. Kim
Keywords
silicon on insulator; SOI device
Issue Date
1986-01
Publisher
International symposium on the physics of semiconductor and its application, Seoul, Korea.
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/22359
Appears in Collections:
KIST Publication > Conference Paper
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