Resist materials for VLSI lithography.

Title
Resist materials for VLSI lithography.
Authors
안광덕
Issue Date
1984-01
Publisher
대한전자공학잡지
Citation
v. 11, no. 5, 75-87
URI
http://pubs.kist.re.kr/handle/201004/22460
Appears in Collections:
KIST Publication > ETC
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