Full metadata record

DC FieldValueLanguage
dc.contributor.author안광덕-
dc.date.accessioned2015-12-02T07:47:18Z-
dc.date.available2015-12-02T07:47:18Z-
dc.date.issued198401-
dc.identifier.citationv. 11, no. 5, 75-87-
dc.identifier.other467-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/22460-
dc.publisher대한전자공학잡지-
dc.titleResist materials for VLSI lithography.-
dc.typeOther-
Appears in Collections:
KIST Publication > ETC
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE