Structural investigation of the bias-enhanced nucleation and growth of diamond films by mirowave plasma chemical vapor deposition.

Title
Structural investigation of the bias-enhanced nucleation and growth of diamond films by mirowave plasma chemical vapor deposition.
Authors
김도근성태연백영준
Keywords
Nucleation
Issue Date
1998-06
Publisher
Journal of the Electrochemical Society
Citation
v. 145, no. 6, 2095-2100
URI
http://pubs.kist.re.kr/handle/201004/22656
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
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