Boron nitride films grown by low energy ion beam assisted deposition

Title
Boron nitride films grown by low energy ion beam assisted deposition
Authors
박영준백영준
Keywords
Boron nitride; c-BN; ion beam; IBAD
Issue Date
1998-09
Publisher
Abst. of the 3rd Int'l meeting of PACRIM 3
Citation
, 196-196
URI
http://pubs.kist.re.kr/handle/201004/22670
Appears in Collections:
KIST Publication > Conference Paper
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