Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O3 thin films

Title
Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O3 thin films
Authors
김형준오성훈장현명
Keywords
thin film; PZT; Stress; Thermodynamic
Issue Date
1999-12
Publisher
MRS fall meeting
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/22742
Appears in Collections:
KIST Publication > Conference Paper
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